CD Laboratory for Direct-Write Fabrication of 3D Nano-Probes

In the nanometre range, complex, free-standing 3D architectures with defined geometries and contamination-free material properties are difficult to produce.

This CD Laboratory is researching a novel 3D nanoprinting technology for 3D nanoprobes.

The research programme concentrates on the "Focused Electron Beam Induced Deposition (FEBID)" fabrication technology, which is playing an increasingly important role in the field of additive, direct manufacturing processes. A unique selling point of this method is the ability to directly produce free-standing 3D nanostructures with a high degree of design flexibility on almost any surface. While the basic mechanisms of manufacturing flat or voluminous structures with FEBID are now well understood, research into complex, free-standing 3D architectures is still in its infancy. In addition to the general fabrication problem, typical metal-based FEBID materials have non-negligible carbon contents, which impair or completely prevent the desired properties of the nanoprobes. Although various processes have been introduced in recent years to completely remove chemical impurities from planar structures, new challenges arise for 3D structures. In detail, the volume loss during chemical purification leads to spatial stresses that negatively affect the structural integrity of 3D nanoarchitectures and lead to massive deformations. In this CD Laboratory, the underlying mechanisms are investigated in detail in order to adapt the chemical transfer process and maintain the original architecture.

Subsequently, the focus will be on proof-of-principle studies with the aim of researching novel 3D nanoprobe concepts. The medium-term goal is applications in in-situ atomic force microscopy. The flexible fabrication and / or modification of the probes with a FEBID-based 3D nanoprinter opens up completely new possibilities in the field of highly localised material analysis, which are currently not available.